Table of Contents

MEMS R&D in Europe.- Integrated MEMS in Conventional CMOS.- Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review.- Microfabrication Technologies for High Performance Microactuators.- Surface Characterization of Non-Lithographic Micromachining.- Biosensors and Microfluidic Systems.- Power MEMS Materials and Structures.- MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization.- New Technology and Applications at Lucas NovaSensor.- Rough Surface Characterization.- Frictional Instabilities.- Wear of Ceramics and Metals.- Mechanics of Wear: From Conventional Components to MEMS.- Rheological Modeling of Thin Film Lubrication.- Surface Roughness Induced Effects in Hydrodynamic Lubrication.- Transition from Elastohydrodynamic to Partial Lubrication.- Micro/Nanotribology: State of the Art and Its Applications.- Pulsed Force Mode: A New Method for Characterizing Thin Silane Films by Adhesive Force Measurements.- Formation of Nanometer-Scale Contacts to Viscoelastic Materials: Implications for MEMS.- Nanotribology of Vapor-Phase Lubricants.- The Tribology of Hydrocarbon Surfaces Investigated Using Molecular Dynamics.- Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces.- Statistical Thermodynamic Treatment of the AFM Tip in Liquid.- Tribological Issues of Polysilicon Surface-Micromachining.- Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications.- Surface Force Induced Failures in Microelectromechanical Systems.- Development, Fabrication and Testing of a Multi-Stage Micro Gear System.- Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors.- Micro/Nanotribological Studies ofSingle-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices.- Phase Transformations in Semiconductors under Contact Loading.- Influence of Water Adsorption on Microtribology of Micromachines.- Tribological Effects of Surface Roughness in MEMS Devices.- Active Friction Control Using Ultrasonic Vibration.- Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch.- Metrology for MEMS Tribology.- Mechanical Property Determination Using Nanoindentation Techniques.- Stress in Thin Films for MEMS Actuators.- Reliability and Fatigue Testing of MEMS.- Surface Modification and Mechanical Properties of Bulk Silicon.- Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope: Mechanisms, Models and Micro- versus Macrotests.- Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination.- Deposition and Characterization of Diamond-Like Materials.- Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications.- a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature.- Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements.- Tribological Properties of Modified MEMS Surfaces.- Breakout Session Report: Tribology Research in MEMS.- Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices.- Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques.- Breakout Session Report: Mechanical Property Measurements.- Panel Discussion Report: Tribology Issues and Opportunities in MEMS.- List ofParticipants.- Editor’s Vita.