Chemistry of the Semiconductor Industry / Edition 1

by S.J. Moss, A. Ledwith

Overview

This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

Product Details

ISBN-13:	9780216920057
Publisher:	Springer Netherlands
Publication date:	02/28/1989
Edition description:	1989
Pages:	426
Product dimensions:	8.27(w) x 11.69(h) x 0.36(d)

Editorial Reviews

'The style and excellent choice of topics and material covered makes this book an ideal starting point for postgraduates and researchers concerned with semiconductor integrated circuit manufacture.' Chemistry in Britain

From the Publisher