Electron Beam Testing Technology / Edition 1

by John T.L. Thong

Overview

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

Product Details

ISBN-13:	9780306443602
Publisher:	Springer US
Publication date:	07/31/1993
Series:	Microdevices
Edition description:	1993
Pages:	462
Product dimensions:	7.01(w) x 10.00(h) x 0.04(d)

Table of Contents

Background to Electron Beam Testing Technology.- I.- 1. Introduction.- 2. Principles and Applications.- II.- 3. Essential Electron Optics.- 4. Electron Beam Interaction with Specimen.- 5. Electron Spectrometers and Voltage Measurements.- 6. High-Speed Techniques.- 7. Picosecond Photoemission Probing.- 8. Signal and Image Processing.- III.- 9. System Integration.- 10. Practical Considerations in Electron Beam Testing.- 11. Industrial Case Studies.

Editorial Reviews

A comprehensive volume on the electron beam testing (EBT) of integrated circuits (ICs), drawing together both background material and recent developments. The text is divided into three parts. Part I is introductory, explaining why such technology has achieved its current status in IC testing, and its basic principles. Part II is a reference section which discusses the fundamental elements of the subject. Part III concentrates on the practical and implementational aspects of the technology, such as test automation and device handling, and includes case studies. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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