MEMS and MOEMS Technology and Applications / Edition 1

by Prosenjit Rai-Choudhury

Overview

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.

Product Details

ISBN-13:	9780819437167
Publisher:	SPIE Press
Publication date:	12/06/2000
Series:	Monographs Series
Edition description:	New Edition
Pages:	528
Product dimensions:	7.30(w) x 10.30(h) x 1.30(d)

Editorial Reviews

A reference or textbook on micro-electromechancial systems and micro-optoelectromechanical systems technologies. Specialists from academia and industry throughout the world cover the technology's capabilities and trends, the operation and design of devices, optical microsystem modeling and simulation, the digital micromirror device, optical waveguides and silicon-based micromachined architecture, optimal communications networks, assembly and testing, and commercializing an emergent disruptive technology. Annotation c. Book News, Inc., Portland, OR (booknews.com)

Booknews