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9780819426574
Microlithography and Metrology in Micromachining III available in Paperback
Microlithography and Metrology in Micromachining III
- ISBN-10:
- 0819426571
- ISBN-13:
- 9780819426574
- Pub. Date:
- 09/28/1997
- Publisher:
- SPIE Press
60.0
In Stock
Product Details
| ISBN-13: | 9780819426574 |
|---|---|
| Publisher: | SPIE Press |
| Publication date: | 09/28/1997 |
| Series: | Proceedings of SPIE Series |
| Pages: | 142 |
| Product dimensions: | 6.00(w) x 1.25(h) x 9.00(d) |
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