Nanofabrication: Fundamentals And Applications

by Ampere A Tseng

Overview

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.

Product Details

ISBN-13:	9789812705426
Publisher:	World Scientific Publishing Company, Incorporated
Publication date:	03/18/2008
Edition description:	New Edition
Pages:	584
Product dimensions:	6.50(w) x 9.60(h) x 1.10(d)

Table of Contents

Preface     vii
Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy   A. A. Tseng   S. D. Sartale   M. F. Luo   C. C. Kuo     1
Atomic Force Microscope Lithography   N. Kawasegi   D. W. Lee   N. Morita   J. W. Park     33
Scanning Probe Arrays for Nanoscale Imaging, Sensing, and Modification   C. Santschi   J. Polesel-Maris   J. Brugger   H. Heinzelmann     65
Using Biomolecules for Self-Assembly of Engineered Nano-Scale Structures and Devices   R. Mehta   J. Lund   B. A. Parviz     127
Nanofabrication Based on Self-Assembled Alumina Templates   S. Sen   N. A. Kouklin     159
Nanowire Assembly and Integration   Z. Gu   D. H. Gracias     187
Taper-Drawing Fabrication of Glass Nanowires   L. Tong   E. Mazur     213
Extreme Ultraviolet Lithography   H. Kinoshita     235
Electron Projection Lithography   T. Miura   K. Suzuki   H. Arimoto   S. Kawata     285
Electron Beam Direct Writing   K. Yamazaki     341
Electron Beam InducedDeposition   K. Mitsuishi     377
High-Resolution Electron-Beam-Induced Deposition   P. A. Crozier   C. W. Hagen     399
Focused Ion Beams and Interaction with Solids   T. Ishitani   T. Ohnishi   T. Yaguchi     431
Nano/Microstructuring of Ceramic Surfaces by Unconventional Lithographic Methods   R. C. Salvarezza   O. Azzaroni     471
Alternative Nanofabrication Approaches for Non-CMOS Applications   C. V. Cojocaru   F. Cicoira   F. Rosei     499
Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques   K. L. Ekinci   J. Brugger     543
Index     567