Scanning Electron Microscopy: Physics of Image Formation and Microanalysis / Edition 2

by Ludwig Reimer

Overview

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Product Details

ISBN-13:	9783642083723
Publisher:	Springer Berlin Heidelberg
Publication date:	12/01/2010
Series:	Springer Series in Optical Sciences , #45
Edition description:	Softcover reprint of the original 2nd ed. 1998
Pages:	529
Product dimensions:	6.10(w) x 9.25(h) x 0.04(d)

Table of Contents

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

Editorial Reviews

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

From the Publisher