Semiconductor Materials and Process Technology Handbook

by Gary F. McGuire

Overview

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

Product Details

ISBN-13:	9780815511502
Publisher:	Elsevier Science
Publication date:	12/31/1988
Series:	Materials Science and Process Technology Series
Pages:	688
Product dimensions:	7.00(w) x 10.00(h) x (d)

Table of Contents

IntroductionSilicon Materials TechnologyThe Thermal Oxidation of Silicon and Other Semiconductor MaterialsChemical Vapor Deposition of Silicon and Its CompoundsChemical Etching and Slice Cleanup of SiliconPlasma Processing: Mechanisms and ApplicationsPhysical Vapor DepositionDiffusion and Ion Implantation in SiliconMicrolithography for VLSIMetallization for VLSI Interconnect and PackagingCharacterization of Semiconductor MaterialsReferencesIndex

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From the Publisher

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI).