Thin Film Materials: Stress, Defect Formation and Surface Evolution / Edition 1

by L. B. Freund, S. Suresh

Overview

This book provides comprehensive coverage of stress, defect formation and surface evolution in thin films. With its balanced coverage of theory, experiment and simulation and many homework problems, the text will be essential reading in senior undergraduate and graduate courses on thin films.

Product Details

ISBN-13:	9780521822817
Publisher:	Cambridge University Press
Publication date:	01/08/2004
Edition description:	New Edition
Pages:	770
Product dimensions:	7.09(w) x 10.04(h) x 1.69(d)

About the Author

L. Ben Freund is the Henry Ledyard Goddard University Professor in the Division of Engineering at Brown University.

Subra Suresh is the Ford Professor of Engineering and Head of the Department of Materials Science and Engineering, and Professor of Mechanical Engineering at Massachusetts Institute of Technology.

Table of Contents

1. Introduction and overview; 2. Film stress and substrate curvature; 3. Stress in anisotropic and patterned films; 4. Delamination and fracture; 5. Film buckling, bulging and peeling; 6. Dislocation formation in epitaxial systems; 7. Dislocation interactions and strain relaxation; 8. Equilibrium and stability of surfaces; 9. The role of stress in mass transport.

Editorial Reviews

'The book is a landmark in a rich subject which has seen many developments over the past decade. In addition to being beautifully written, the book contains many illustrations, micrographs, and problems for students. The book will serve as a graduate text, as well as a comprehensive monograph everyone working in the field will want to own.' Professor John W. Hutchinson, Harvard University

'Freund and Suresh have written a masterpiece on thin film materials that will become a classic reference for this newly developed field. Their book provides an organized and beautifully written exposition of the subject of thin film mechanical behavior. For the first time there is a single starting point for the field. The book brings together materials and mechanics aspects of thin films effortlessly, reflecting the authors' expertise in joining these fields of science and engineering.' Professor William D. Nix, Stanford University

'I would heartily recommend this book as an essential read for anyone working in any area of thin film deposition.' Materials World

'Thin Film Materials will prove a valuable resource. It contains a wealth of useful references and good indexes. It is richly illustrated, and there are good exercises after each chapter. For a graduate course in the field, it will be hard to beat. And if the authors are right, there will be a growing demand for such courses.' The Times Higher Education Supplement

From the Publisher