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Introduction to VLSI Process Engineering

By Y. Naka (Editor), K. Sugawara (Editor), C. McGreavy (Editor)
Hardcover
$109.99
By Y. Naka (Editor), K. Sugawara (Editor), C. McGreavy (Editor)
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Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

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